4.4 VARIABLE CAPACITANCE TRASDUCERS: Transducers based on the principle of changes in the capacitance are generally termed as ca
DESIGN, FABRICATION, AND CALIBRATION OF CAPACITIVE AIR GAP SENSORS FOR APPLICATION IN LEVITATION BASED GUIDES IN MICROACTUATORS
![A barometric pressure sensor based on the air-gap scale effect in a cantilever: Applied Physics Letters: Vol 103, No 14 A barometric pressure sensor based on the air-gap scale effect in a cantilever: Applied Physics Letters: Vol 103, No 14](https://aip.scitation.org/action/showOpenGraphArticleImage?doi=10.1063/1.4824027&id=images/medium/1.4824027.figures.f1.gif)